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RF MEMS — The MEMS acronym stands for Micro Electromechanical System and is used to refer to components of which sub millimeter sized parts need to move for the components to have electronic functionality. RF MEMS passives, such as capacitors, inductors,… … Wikipedia
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Micro-Opto-Electro-Mechanical Systems — (MOEMS) is not a special class of Micro Electro Mechanical Systems (MEMS) but in fact it is MEMS merged with Micro optics which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and… … Wikipedia
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Capacitor — This article is about the electronic component. For the physical phenomenon, see capacitance. For an overview of various kinds of capacitors, see types of capacitor. Capacitor Modern capacitors, by a cm ruler Type Passive … Wikipedia